Fabrication of a Y-splitter Modulator Embedded in LiNbO3 with a Femtosecond Laser
| Autor: | Xu ZZ(徐至展), Jian Xu, Koji Sugioka, Liao Y(廖洋), Ya Cheng, and Midorikawa K |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Fabrication
Materials science business.industry Lithium niobate Laser direct writing Laser Femtosecond laser ablation Industrial and Manufacturing Engineering law.invention chemistry.chemical_compound Microelectrode Optics chemistry law Splitter Femtosecond Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Journal of Laser Micro/Nanoengineering. 5:25-27 |
| ISSN: | 1880-0688 |
| Popis: | We describe a technique to integrate embedded microelectrodes and optical waveguides in Lithium niobate (LiNbO3) using a femtosecond laser, and a Y-splitter modulator was demonstrated. The Y-splitter was fabricated by femtosecond laser direct writing and the embedded microelectrodes were fabricated by combining femtosecond laser ablation with selective electroless plating. The embedded microelectrodes give rise to homogeneous electric field across the optical waveguides, which could result in effective electro-optic overlap. The simple and flexible technique could open new opportunities for fabricating integrated 3D electro-optic devices. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|