Coevaporation and structuring of titanium–aluminum alloy thin films
| Autor: | Steffen Heicke, Eric Lattner, Marietta Seifert, Siegfried Menzel, Thomas Gemming |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Fabrication business.industry Metallurgy Surface acoustic wave Intermetallic Titanium alloy 02 engineering and technology Surfaces and Interfaces 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films Vacuum deposition Creep 0103 physical sciences Microelectronics Thin film Composite material 0210 nano-technology business |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:061603 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | Intermetallic phases of binary material systems, such as TiAl, Ti3Al, RuAl, and Ni3Al have special physical properties such as a high oxidation resistance and low creep at high temperatures and a mechanical stability over wide temperature ranges. Due to new fields of application, such phases became increasingly important in the last two decades. In general, alloys can be sputtered very easily and reproducible. In surface acoustic wave (SAW) technology and microelectronics, the lift-off structuring technique is a fundamental process in the production of structured thin ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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