Reduction of AlGaAs Heterostructure High-Index-Contrast Ridge Waveguide Scattering Loss by Sidewall Smoothing Through Oxygen-Enhanced Wet Thermal Oxidation
| Autor: | C. S. Seibert, Douglas C. Hall, Di Liang, Z.A. Shellenbarger |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Thermal oxidation
Materials science business.industry Oxide Heterojunction Cladding (fiber optics) Atomic and Molecular Physics and Optics Light scattering Electronic Optical and Magnetic Materials Gallium arsenide chemistry.chemical_compound chemistry Optoelectronics Electrical and Electronic Engineering Silicon oxide business Smoothing |
| Zdroj: | IEEE Photonics Technology Letters. 22:18-20 |
| ISSN: | 1941-0174 1041-1135 |
| DOI: | 10.1109/lpt.2009.2035328 |
| Popis: | We demonstrate the efficacy of oxidation smoothing of sidewall roughness in high-index-contrast AlGaAs heterostructure ridge waveguides via oxygen-enhanced nonselective wet thermal oxidation for reducing scattering loss. Single-mode waveguides of core widths between 1.5 and 2.2 ?m are fabricated using both the inward growth of a ~ 600-nm sidewall-smoothing native oxide outer cladding and, for comparison, encapsulation of an unoxidized etched ridge with a ~ 600-nm deposited silicon oxide cladding layer. On average, measured loss coefficients are reduced by a factor of 2 with the oxidation smoothing process. |
| Databáze: | OpenAIRE |
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