Significant enhancement of photoresponsivity in As-doped n-BaSi2epitaxial films by atomic hydrogen passivation

Autor: Kaoru Toko, Kazuhiro Gotoh, Takuma Sato, Zhihao Xu, Sho Aonuki, Takashi Suemasu, Noritaka Usami, Yudai Yamashita, Yoshikazu Terai
Rok vydání: 2020
Předmět:
Zdroj: Applied Physics Express. 13:051001
ISSN: 1882-0786
1882-0778
Popis: We grew 500-nm-thick lightly As-doped n-BaSi2 epitaxial films at 600 °C by molecular beam epitaxy, and supplied atomic H in durations (t BaSi:H) of 0–30 min, followed by capping with a 3-nm-thick amorphous Si layer at 180 °C. The photoresponsivity of the BaSi2 films was enhanced by approximately five times by As doping. Deep-level transient spectroscopy measurement revealed the disappearance of two previously reported electron traps. The photoresponsivity was further enhanced by approximately six times after H supply. It reached a maximum at t BaSi:H = 1–10 min, owing to the reduction of defects.
Databáze: OpenAIRE