Resonant Accelerometers using Electrostatic Potential between the Comb Electrodes

Autor:	Keisuke Hoshino, Jiannan Liu, Hideo Muro
Rok vydání:	2018
Předmět:	business.industry Mechanical Engineering Electrode Optoelectronics Electrical and Electronic Engineering business Resonant sensor
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 138:226-230
ISSN:	1347-5525 1341-8939
DOI:	10.1541/ieejsmas.138.226
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e73bbacfb408f6362e15ee89a22a5f8d https://doi.org/10.1541/ieejsmas.138.226 Zobrazit plný text záznamu