Influence of the deposition temperature and PB species flux on the characteristics of PbTiO3thin films deposited by sputtering on optical fibers

Autor:	D. Costantini, Paul Muralt, C.A.P. Muller
Rok vydání:	1999
Předmět:	Materials science Analytical chemistry Dielectric Condensed Matter Physics Microstructure Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Sputtering Electrode Deposition (phase transition) Lead titanate Thin film Perovskite (structure)
Zdroj:	Ferroelectrics. 225:133-140
ISSN:	1563-5112 0015-0193
DOI:	10.1080/00150199908009120
Popis:	Integrated optical devices can be fabricated by the deposition of an electrode/piezoelectric/electrode multilayer thin film structure onto optical fibers, The particular structure used in this work is Au/PbTiO3/Pt/Ti, where the PbTiO3 is deposited by DC reactive magnetron sputtering at high temperature to obtain in situ crystallised perovskite structure. Preliminary studies showed that the deposition temperature and the relative fluences of the Pb and Ti species are determining parameters for the growth of phase pure perovskite PbTiO3. This study shows the effect of both parameters on the resulting film. The occurrence of a self-stabilising region for the growth of pure perovskite phase PbTiO3 has been observed. The maximal achievable dielectric constant depends on the relative Pb flux used. It increases with increasing PbO to TiO2 fluxes ratio. X-ray, microstructure, conductivity results and optical response of the devices are also briefly presented. An optical phase shift of 0.4 mrad/V has been measured for low frequency electrical excitation.
Databáze:	OpenAIRE
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