Two-dimensional analysis of temperature-gradient actuation of cantilever beam resonators
| Autor: | Rashed Mahameed, David Elata |
|---|---|
| Rok vydání: | 2005 |
| Předmět: |
Work (thermodynamics)
Engineering Cantilever Field (physics) Parametric analysis business.industry Mechanical Engineering Mechanics Structural engineering Electronic Optical and Magnetic Materials Resonator Temperature gradient Mechanics of Materials System parameters Electrical and Electronic Engineering Actuator business |
| Zdroj: | Journal of Micromechanics and Microengineering. 15:1414-1424 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/15/8/006 |
| Popis: | This work considers microresonators that are driven by a temperature-gradient actuator. The driving forces in the temperature-gradient actuation scheme are internal mechanical moments induced by temperature gradients. In this work, a model for analyzing the dynamic thermomechanical response of temperature-gradient actuators is presented. In this model, the two-dimensional nature of the temperature field is fully considered. Several test structures were fabricated and their dynamic thermomechanical response was found to be in agreement with the model predictions. Some examples of parametric analysis are presented that show how the two-dimensional model can be used to optimize the system parameters under specific constraints of the operation conditions. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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