Cost analysis of device options and scaling boosters below the A14 technology node

Autor:	Gioele Mirabelli, Anne Vandooren, Cesar Roda Neve, Victor Vega Gonzalez, Hans Mertens, Anita Farokhnejad, Pieter Schuddinck, Gayle Murdoch, Shairfe Muhammad Salahuddin, Odysseas Zografos, Lars Ragnarsson, Pieter Weckx, Zsolt Tokei, Geert Hellings, Julien Ryckaert
Rok vydání:	2023
Zdroj:	DTCO and Computational Patterning II.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e71062f4e385f63c97b6615098f3e10f https://doi.org/10.1117/12.2656456 Zobrazit plný text záznamu