Anti-Coking Performance of Ethyl Benzene Pyrolysis of Silicon-Based Films Prepared through Plasma-Enhanced Chemical Vapour Deposition

Autor:	Wei Wang, Anjiang Tang, Shiyun Tang, Deju Wei, Lijun Chen
Rok vydání:	2022
Předmět:	Electronic Optical and Magnetic Materials
Zdroj:	Silicon. 14:8359-8369
ISSN:	1876-9918 1876-990X
DOI:	10.1007/s12633-021-01632-0
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e6e9be3c9ad084472303df675f0b4813 https://doi.org/10.1007/s12633-021-01632-0 Zobrazit plný text záznamu Full text from SpringerLink