Selective Area Crystallization of Amorphous Silicon using a Micro Patterned SiO2 Capping Layer

Autor: Do Kyung Kim, Woong Hee Jeong, Tae Hyung Hwang, Nam Seok Roh, Hyun Jae Kim
Rok vydání: 2009
Zdroj: ECS Meeting Abstracts. :767-767
ISSN: 2151-2043
DOI: 10.1149/ma2009-01/18/767
Popis: not Available.
Databáze: OpenAIRE