Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection
| Autor: | Olav Solgaard, Matthew P. Scott, Ralph W. Bernstein, Xiaojing Zhang, Matt Fish, Ozgur Sahin, Stefan Zappe, Chung-Chu Chen |
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| Rok vydání: | 2004 |
| Předmět: |
Rotary encoder
Materials science Silicon Penetration force Dynamic range business.industry Metals and Alloys chemistry.chemical_element Penetration (firestop) Injector Condensed Matter Physics Force sensor Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Optics chemistry law Electrical and Electronic Engineering business Instrumentation Encoder |
| Zdroj: | Sensors and Actuators A: Physical. 114:197-203 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2003.11.028 |
| Popis: | We present a micrograting-based force sensor integrated with a surface micromachined silicon-nitride probe for penetration and injection into Drosophila embryos. The probe is supported by springs of a known spring constant, and the penetration force is determined from displacement measurements using a high-resolution, miniaturized optical encoder that is designed to only be sensitive to axial deflections of the probe. The optical-encoder force sensor exhibits configurable sensitivity and dynamic range, allowing monitoring over a wide range of forces. The periodicity of the encoder response can be used for calibration of the injector displacement and to obtain information about the localized elastic properties of the target. We used an force sensor with a measured spring constant of 1.85 N/m for penetration experiments on Drosophila embryos, and found a penetration force of 52.5 μN (±13.2%) and a membrane displacement of 58 μm (±5.2%). |
| Databáze: | OpenAIRE |
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