VO2 and V2O3 Films Fabricated on (1000) or (1010)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Annealing Processes

Autor:	Jung Wook Lim, Haechoen Kim, Jong-Su Noh, Sun-Jin Yun
Rok vydání:	2008
Předmět:	Materials science business.industry Annealing (metallurgy) Cavity magnetron Optoelectronics Nanotechnology Sputter deposition business
Zdroj:	Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e6b2086a270934b1d2cd503917cbee50 https://doi.org/10.7567/ssdm.2008.p-8-7 Zobrazit plný text záznamu