Optical inspection of micro-electromechanical systems

Autor:	Mikhail Bryushinin, Igor A. Sokolov, Sanowar H. Khan, Kenneth T. V. Grattan, P. M. Karavaev
Rok vydání:	2008
Předmět:	Vibration Physics Interferometry Optics Scattering business.industry Adaptive system Physics::Optics Photodetector Nonlinear optics Photorefractive effect business Laser Doppler vibrometer
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.797559
Popis:	We report the results of utilization of wide-gap photorefractive sillenite crystals as adaptive photodetectors (AP) for optical inspection of micro-electromechanical systems. The operation principle of AP is based on two-wave mixing and non-steady-state photoelectromotive force effects in photorefractive crystals. The results of measurements of small vibration amplitudes and resonant frequencies of the diffusely scattering objects and micro-electromechanical systems are given. The presented adaptive interferometric systems are suitable for industrial applications.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e68a828685ef04b47b09a8e7e335f3c5 https://doi.org/10.1117/12.797559 Zobrazit plný text záznamu