Investigation of secondary-emission signal formation in the low-voltage SEM mode
| Autor: | V. V. Kazmiruk, I. G. Kurganov, A. A. Podkopaev, N. N. Osipov, T. N. Savitskaya |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Conventional transmission electron microscope Materials science business.industry Scanning electron microscope 030206 dentistry 01 natural sciences Acceleration voltage Signal Secondary electrons Surfaces Coatings and Films 03 medical and health sciences 0302 clinical medicine Optics Secondary emission 0103 physical sciences Electron beam-induced deposition business Environmental scanning electron microscope |
| Zdroj: | Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 10:887-891 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451016050086 |
| Popis: | We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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