Laser solid-phase doping of semiconductors
| Autor: | A. S. Seferov, A. A. Manenkov, Ioan Ursu, A.V. Pokhmurskaja, A.Yu. Bonchik, A M Prokhorov, Valentin Craciun, Ion N. Mihailescu, G. N. Mikhailova, S. G. Kiyak |
|---|---|
| Rok vydání: | 1989 |
| Předmět: |
Materials science
Dopant business.industry Doping General Physics and Astronomy Heterojunction Surfaces and Interfaces General Chemistry Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Condensed Matter Physics Laser Surfaces Coatings and Films law.invention Condensed Matter::Materials Science Semiconductor law Microelectronics Optoelectronics Wafer business Ohmic contact |
| Zdroj: | Applied Surface Science. 43:340-345 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/0169-4332(89)90236-5 |
| Popis: | Physical processes that occur at nonequilibrium solid-phase diffusion of impurities into semiconductors under CW CO2 laser irradiation are studied. A number of applications of solid-phase processes stimulated by laser radiation are grounded for microelectronics, involving formation of submicron dopant layers, cleaning of dielectric coating on semiconductor wafer surfaces, making of Ohmic contacts, p-n- and heterojunctions. |
| Databáze: | OpenAIRE |
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