SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition

Autor:	Julien Fort, Stefano Ventola, Francesco La Spada, Paolo Maniscalco
Rok vydání:	2001
Předmět:	Metal Materials science visual_art visual_art.visual_art_medium General Materials Science Nanotechnology Dielectric Condensed Matter Physics Deposition (chemistry) Atomic and Molecular Physics and Optics Characterization (materials science)
Zdroj:	Solid State Phenomena. :759-764
ISSN:	1662-9779
DOI:	10.4028/www.scientific.net/ssp.82-84.759
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e638427869d9f113cc4548edc693f9ad https://doi.org/10.4028/www.scientific.net/ssp.82-84.759 Zobrazit plný text záznamu