SOI Based Micro-Bead Catalytic Gas Sensor

Autor: István Bársony, Dmitry Filipchuk, Ferenc Biro, Maya Etrekova, Csaba Ducso, Nikolay Samotaev, Alexander Pisliakov
Rok vydání: 2020
Předmět:
Zdroj: Springer Proceedings in Physics ISBN: 9783030588670
Popis: One of the most dangerous threats to everyday life and industrial activity is the possible explosion of earth gas, which can occur in various conditions, but usually occurs due to an excess of explosive gases in an enclosed environment. In order to protect people at their home and workplace, several types of gas sensors have been developed. Nevertheless, one of the most useful devices for explosive and combustive gases detection is the catalytic gas sensor. This type of sensors has shown a good performance in detecting of flammable gases with concentration close to the lower explosion limit (LEL). In order to meet the growing need for portable devices further evolution of these gas sensors is required to make them smaller and reduce the power consumption. To achieve this goal it is essential to reduce the 120 to 150 mW power dissipation of the Pt-coil based sensors (pellistors). Low Power Thermocatalytic Sensors manufactured with SOI (silicon on insulator) technology can be functional at temperatures below 600 ℃ with the power consumption in a range of 20–50 mW. The current aim of researches is the elaboration of novel sensor processing and development of nanostructured catalyst layer which is stable and effective at high temperatures and compatible with microelectronic silicon MEMS technology.
Databáze: OpenAIRE