MNS-12 Development of Pneumatic Servo Bearing Actuator for Nano-Positioning(Micro/Nanosystem Science and Technology III,Technical Program of Oral Presentations)

Autor:	Takashi Matsuoka, Katto Satoshi, Masato Kadotani, Tomoko Hirayama, Sasaki Katsumi, Takakazu Kitagawa
Rok vydání:	2009
Předmět:	Engineering Bearing (mechanical) law business.industry Nano Mechanical engineering General Medicine Science technology and society business Actuator Servo law.invention
Zdroj:	Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE. 2009:185-186
ISSN:	2424-3132
DOI:	10.1299/jsmemipe.2009.185
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e611c135041cee9eb514fc803387676c https://doi.org/10.1299/jsmemipe.2009.185 Zobrazit plný text záznamu