Scanning capacitance microscopy

Autor:	J. R. Matey, J. Blanc
Rok vydání:	1985
Předmět:	Microscope Chemistry Scanning electron microscope business.industry General Physics and Astronomy Scanning capacitance microscopy Dielectric Capacitance law.invention Optics law Microscopy Capacitance probe Composite material business Feature-oriented scanning
Zdroj:	Journal of Applied Physics. 57:1437-1444
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.334506
Popis:	Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5f3a3269ebadb3b0dbcc8a7e8140e99 https://doi.org/10.1063/1.334506 Zobrazit plný text záznamu