Fabrication of silicon-based field emitter arrays

Autor:	G. E. McGuire, D. Temple
Rok vydání:	1996
Předmět:	Fabrication Materials science Field (physics) Silicon business.industry chemistry.chemical_element Silicon based Field electron emission chemistry Miniaturization Optoelectronics Microelectronics business Common emitter
Zdroj:	AIP Conference Proceedings.
ISSN:	0094-243X
DOI:	10.1063/1.51123
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5e728110d172455a6318a8c29a0c693 https://doi.org/10.1063/1.51123 Zobrazit plný text záznamu