P-31: Effect of Metal Surface Treatments on the Characteristics of MIM Diode for the FED Application

Autor:	Sun Jin Yun, Chi-Sun Hwang, Sang-Hee Ko Park
Rok vydání:	2003
Předmět:	Materials science chemistry.chemical_element Insulator (electricity) Oxygen Cathode law.invention Metal chemistry law visual_art Electrode visual_art.visual_art_medium Electronic engineering Thin film Composite material Tin Diode
Zdroj:	SID Symposium Digest of Technical Papers. 34:316
ISSN:	0097-966X
Popis:	We investigated the effect of bottom metal surface treatments on the characteristics of metal/insulator/metal MIM cathode including ALD grown AlOx thin film as an insulating layer. The electrical conduction properties of AlOx thin film with Al bottom electrode, treated under N2/H2alloy, oxygen, air, or water atmosphere at the temperature of 400°C, and TiN/Al top electrode were characterized. The MIM cathode containing alloyed Al as bottom electrode showed high breakdown strength and high current density compared to other MIM cathodes.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5d1f5731ead7bf9b0b2775e5700bd1a https://doi.org/10.1889/1.1832274 Zobrazit plný text záznamu Plný text