Popis: |
We investigated the effect of bottom metal surface treatments on the characteristics of metal/insulator/metal MIM cathode including ALD grown AlOx thin film as an insulating layer. The electrical conduction properties of AlOx thin film with Al bottom electrode, treated under N2/H2alloy, oxygen, air, or water atmosphere at the temperature of 400°C, and TiN/Al top electrode were characterized. The MIM cathode containing alloyed Al as bottom electrode showed high breakdown strength and high current density compared to other MIM cathodes. |