P-75: Advanced Halftone Photolithography Using Four-Mask Process Architecture for G8.6 TFT-LCDs
| Autor: | An-Thung Cho, James Hsu, Jeff Zhou, Jinn Hong, Feng-yun Yang, Yan-mei Luo, Yi-qun Tian, Dan Lei, Zhen Liu, Qiong-hua Mo, Kai-jun Liu, Bang-tong Ge, Feng-xiang Long, Ting-ting Fu, Min Li, Wade Chen, York Lu |
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| Rok vydání: | 2018 |
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| Zdroj: | SID Symposium Digest of Technical Papers. 49:1471-1474 |
| ISSN: | 0097-966X |
| DOI: | 10.1002/sdtp.12240 |
| Databáze: | OpenAIRE |
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