A Cryostat for the Vacuum Deposition onto the Low- Temperature Substrate

Autor:	Nobukazu Ishihara, Taizo Imura, Masakazu Okada, Masaru Katoh
Rok vydání:	1977
Předmět:	Cryostat Materials science Vacuum deposition Chemical engineering Substrate (printing) Electrical and Electronic Engineering Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 20:289-292
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.20.289
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e57b98c73522d84433f3631cfd2d2af8 https://doi.org/10.3131/jvsj.20.289 Zobrazit plný text záznamu