Contamination-insensitive differential capacitive pressure sensors

Autor:	Bishnu P. Gogoi, Chuan Che Wang, Carlos H. Mastrangelo, D.J. Monk
Rok vydání:	2000
Předmět:	Chemistry Mechanical Engineering Capacitive sensing Analytical chemistry Linearity Pressure sensor Capacitance law.invention Surface micromachining Pressure measurement law Electrical and Electronic Engineering Composite material Temperature coefficient Sensitivity (electronics)
Zdroj:	Journal of Microelectromechanical Systems. 9:538-543
ISSN:	1941-0158 1057-7157
DOI:	10.1109/84.896776
Popis:	In this paper, a contamination-insensitive differential capacitive pressure sensor with a sealed gap is presented. This device is made of three polysilicon layers including a stationary middle plate and the top and bottom plates that are rigidly coupled together by a series of posts hence deflecting in tandem by a change in differential or gauge pressure. Because of the posts, however, the device is insensitive to common-mode pressure. As the differential pressure is changed from -70 to 70 kPa, the capacitance between the bottom and middle plates changes by 73 fF (sensitivity of approximately 0.5 fF/kPa), yet there is only a 2-fF change in output when the common-mode pressure is changed from 30 to 200 kPa. The devices have a linearity error on the order of -15% FSS and a temperature coefficient of offset of 170 ppm//spl deg/C.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e56f81297699fdf0715d03653190c1ac https://doi.org/10.1109/84.896776 Zobrazit plný text záznamu