Investigation of Bomb Defects: Reducing the Defect From Perhydropolysilazane Layer On Semiconductor
| Autor: | Chae Jung Lee, Yun Ho Kim, Jin Sung Kim, Jung sook OH, Byoung Deog Choi |
|---|---|
| Rok vydání: | 2013 |
| Zdroj: | ECS Meeting Abstracts. :2080-2080 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2013-02/29/2080 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|