Evaluating the Drift-Region Length Effect of nLDMOS on ESD Ability with a TLP Testing System

Autor: Sheng-Kai Fan, Shen-Li Chen, Pei-Lin Wu, Yu-Lin Jhou, Po-Lin Lin
Rok vydání: 2019
Předmět:
Zdroj: GCCE
DOI: 10.1109/gcce46687.2019.9015277
Popis: In this work, the effect of different drift region lengths on the ESD ability in ultra-high voltage LDMOS is proposed and verified via a 0.5 μm 300 V process. By the different drift-region lengths, the corresponding breakdown voltage can result in the corresponding trigger voltage, holding voltage and secondary breakdown current. As the drift-region length decreases, V t1 and V h values will decrease both too. Eventually, as the drift-region length is 5.8 μm, the optimized secondary breakdown current can be upgraded to 6.842 A. The overall DUTs has higher ESD ability than that of the reference group.
Databáze: OpenAIRE