Surface Analysis Of Lcd Materials iN Various Stages of Production by Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)

Autor:	P.M. Lindley, J.J. Lee, R.W. Odom
Rok vydání:	1994
Předmět:	Secondary ion mass spectrometry Materials science Liquid-crystal display law Time of flight secondary ion mass spectroscopy Monolayer Analytical chemistry Molecule Solid material Mass spectrometry Characterization (materials science) law.invention
Zdroj:	MRS Proceedings. 345
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-345-197
Popis:	Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a surface analysis technique which provides a sensitive characterization of the elemental and molecular composition of the near-surface region (top few monolayers) of solid materials1. This mass spectrometry technique can also localize the distribution of specific elements, molecules or molecular fragments at submicrometer (µm) lateral resolutions.2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5322235dbb6ad2af59b24d1089f6f13 https://doi.org/10.1557/proc-345-197 Zobrazit plný text záznamu Full text from SpringerLink