Effects of monitoring accuracy on thin film filter performance
Autor: | Stan Debski, Hongbai Lao, Mikelis Svilans, Krassimir Stoev |
---|---|
Rok vydání: | 2001 |
Předmět: | |
Zdroj: | Optical Interference Coatings. |
Popis: | Analytical techniques were applied for analysis of monitor data from many deposition runs to measure the end-pointing accuracy. Results show that the magnitude of transmission ripple in the filter pass-band spectrum bears a strong correlation to the standard deviation of the endpointing from the target. |
Databáze: | OpenAIRE |
Externí odkaz: |