Autor:	Stan Debski, Hongbai Lao, Mikelis Svilans, Krassimir Stoev
Rok vydání:	2001
Předmět:	Materials science Transmission (telecommunications) Filter (video) Acoustics Ripple Electronic engineering Measure (physics) Deposition (phase transition) Magnitude (mathematics) Thin film Standard deviation
Zdroj:	Optical Interference Coatings.
Popis:	Analytical techniques were applied for analysis of monitor data from many deposition runs to measure the end-pointing accuracy. Results show that the magnitude of transmission ripple in the filter pass-band spectrum bears a strong correlation to the standard deviation of the endpointing from the target.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5319d722bc88915723974cf640f810c https://doi.org/10.1364/oic.2001.me3 Zobrazit plný text záznamu