Growth of vertical carbon nanotubes according to the Al2O3 buffer layer preparation

Autor:	Ik-Tae Im, Jong Seok Kim, Young-Woon Jang
Rok vydání:	2013
Předmět:	Materials science Atomic force microscopy Annealing (metallurgy) General Chemical Engineering chemistry.chemical_element Nanotechnology Chemical vapor deposition Carbon nanotube Oxygen Buffer (optical fiber) law.invention Chemical engineering chemistry Sputtering law
Zdroj:	Journal of Industrial and Engineering Chemistry. 19:1501-1506
ISSN:	1226-086X
DOI:	10.1016/j.jiec.2013.01.016
Popis:	Carbon nanotubes (CNTs) have been extensively studied for several decades due to its promising properties. In this study, effects of the Al2O3 buffer layer on the growth of the wellorganized CNTs forest were studied. The buffer layers were prepared by the two methods, direct sputtering using Al with oxygen feeding and annealing the sputtered pure Al films to obtain Al2O3 films. FE-SEM and AFM results showed that the surface of the buffer layer by the first method was more clean and smooth. The CNTs forest using the first buffer layer showed better results both in the growth length and CNTs quality.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e5180b5374e4ac8f0bf34e8f917c33f1 https://doi.org/10.1016/j.jiec.2013.01.016 Zobrazit plný text záznamu Full Text from ScienceDirect