The Simulation of Energy Distribution of Electrons Detected by Segmental Ionization Detector in High Pressure Conditions of ESEM

Autor:	Ivo Konvalina, Martin Oral, Vilém Neděla, J. Hudec
Rok vydání:	2015
Předmět:	Physics::Instrumentation and Detectors Chemistry Helium ionization detector Monte Carlo method Vapour pressure of water Electrode Electron Atomic physics Discharge ionization detector Instrumentation Signal Environmental scanning electron microscope
Zdroj:	Microscopy and Microanalysis. 21:264-269
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927615013483
Popis:	This paper presents computed dependencies of the detected electron energy distribution on the water vapour pressure in an environmental scanning electron microscope obtained using the EOD software with a Monte Carlo plug-in for the electron-gas interactions. The software GEANT was used for the Monte Carlo simulations of the beam-sample interactions and the signal electron emission from the sample into the gaseous environment. The simulations were carried out for selected energies of the signal electrons collected by two electrodes with two different diameters with the voltages of +350 V and 0, respectively, and then 0 and +350 V, respectively, and for the distance of 2 mm between the sample and the detection electrodes of the ionization detector. The simulated results are verified by experimental measurements. Consequences of the simulated and experimental dependencies on the acquisition of the topographical or material contrasts using our ionization detector equipped with segmented detection electrode are described and discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e4fa53b42233667e831ba74b876e8c3a https://doi.org/10.1017/s1431927615013483 Zobrazit plný text záznamu