Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic

Autor:	Ji Hoon Cha, Kun Tack Lee, Joo Tae Moon, Woo Gwan Shim, Dae Hyuk Kang, Chang Sup Mun, Chang-ki Hong, Han-Ku Cho
Rok vydání:	2007
Předmět:	Materials science Silicon chemistry Scientific method Particle chemistry.chemical_element General Materials Science Nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics
Zdroj:	Solid State Phenomena. 134:209-212
ISSN:	1662-9779
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e4cac4be5602ee171f12f53f00a61c74 https://doi.org/10.4028/www.scientific.net/ssp.134.209 Zobrazit plný text záznamu