Analysis of anisotropic ionization coefficient in bulk 4H-SiC with full-band Monte Carlo simulation

Autor: Yoshinari Kamakura, Y. Ueoka, K. Konaga, T. Kotani, R. Fujita, Nobuya Mori
Rok vydání: 2017
Předmět:
Zdroj: 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
DOI: 10.23919/sispad.2017.8085321
Popis: High-field electron transport characteristics in bulk 4H-SiC are simulated with the full-band Monte Carlo method, and anisotropy of the ionization coefficient α is discussed. The simulation results exhibit larger α along 〈1120〉 direction than 〈0001〉 direction, which is consistent with the experimental observation. Furthermore, the dependence of α on the electric field direction θ is investigated. Compared to the existing analytical model, the present simulation results show a steeper increase when θ is tilted from the c-axis, which is originated from the anisotropic nature of the hot-electron heating.
Databáze: OpenAIRE