ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment

Autor:	Jeongsun Ahn, Duyeon Kim, Mingi Song, Jaehong Min, Jimin Hwang, Juhye Kwon, Hyun-Jung Kim
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. 35:137-145
ISSN:	1558-2345 0894-6507
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e44c42156daab44ff91d376c80f3d585 https://doi.org/10.1109/tsm.2021.3135434 Zobrazit plný text záznamu