Surface analysis of layered thin films using a synchrotron x‐ray microbeam combined with a grazing‐exit condition

Autor:	Takashi Noma, Atsuo Iida
Rok vydání:	1994
Předmět:	Materials science business.industry X-ray Synchrotron radiation Microbeam Synchrotron law.invention Optics law Thin film business Instrumentation Intensity modulation Image resolution Intensity (heat transfer)
Zdroj:	Review of Scientific Instruments. 65:837-844
ISSN:	1089-7623 0034-6748
Popis:	A new surface characterization technique with a lateral spatial resolution has been developed for nondestructive surface analysis using a synchrotron x‐ray microbeam. The grazing‐exit condition for fluorescent x‐ray detection is utilized to attain the surface sensitivity. A focused x‐ray microbeam of high photon flux has realized a lateral spatial resolution of a few μm. A layered thin‐film electrode is analyzed in both the scanning and point modes. In the point mode, the analyzing position is fixed while the exit angle is changed. The characterization of thin films over a small region is made. In the scanning mode, the exit angle is fixed while the sample is being scanned. The two‐dimensional intensity distribution reflects depth information in addition to the lateral elemental distribution. The intensity modulation near to the surface step of the pattern edge is discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e432cf130169f329bb1d3018c12a4225 https://doi.org/10.1063/1.1144908 Zobrazit plný text záznamu