A novel pH sensitive ISFET with on chip temperature sensing using CMOS standard process
| Autor: | Jung-Chuan Chou, Tai-Ping Sun, Shen-Kan Hsiung, Yuan-Lung Chin, Wen-Yaw Chung |
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| Rok vydání: | 2001 |
| Předmět: |
Materials science
business.industry Metals and Alloys Analytical chemistry Condensed Matter Physics Chip Temperature measurement Surfaces Coatings and Films Electronic Optical and Magnetic Materials CMOS Materials Chemistry Optoelectronics Field-effect transistor Electrical and Electronic Engineering ISFET business Instrumentation Temperature coefficient p–n diode Diode |
| Zdroj: | Sensors and Actuators B: Chemical. 76:582-593 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(01)00639-6 |
| Popis: | A monolithic chip processing method is reported, which includes the ion sensitive field effect transistor (ISFET) of the pH sensor, p–n diode of temperature sensor and readout circuit using 0.5 μm double poly double metal (DPDM) standard CMOS product with UMC IC foundry company. We have designed a planar diffused silicon diode on a n-channel pH sensitive ISFET sensor to act as a temperature sensor for on-chip temperature measurement and compensation. Furthermore, the device integrated the dual sensors and readout circuit has the potential advantages of achieving, both the pH and temperature value display, with this process, ISFET’s temperature coefficient can be minimized. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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