Structural, mechanical and frictional properties of tetrahedral amorphous carbon film by filtered cathodic vacuum arc system
| Autor: | Xiang Yu, Fu-tian Liu, Chengbiao Wang, Zhiqiang Fu, Xu Zhang |
|---|---|
| Rok vydání: | 2007 |
| Předmět: |
Materials science
Silicon chemistry.chemical_element Surfaces and Interfaces General Chemistry Vacuum arc Substrate (electronics) Condensed Matter Physics Surfaces Coatings and Films symbols.namesake Amorphous carbon chemistry Materials Chemistry symbols Texture (crystalline) Composite material Thin film Raman spectroscopy Elastic modulus |
| Zdroj: | Surface and Coatings Technology. 201:4995-4998 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2006.07.194 |
| Popis: | Tetrahedral amorphous carbon (ta-C) film was deposited on silicon coupons using a Filtered Cathodic Vacuum Arc system with a pre-implantation process, and then was investigated by some systematic analyses. The ta-C film shows a very smooth surface morphology and a dense cross-section texture, along with a gradient interlayer, about 0.5 μm between the substrate and ta-C film, also has a board distribution of asymmetric Raman intensity in the range of 1200–1700 cm − 1 , centered at 1567 cm − 1 . Microhardness and elastic modulus of ta-C film are 47.74 GPa and 298.46 GPa, respectively. Ta-C film also possesses a good adhesion, critical load (Lc) of 42 mN. Moreover, the ta-C film owns a low friction coefficient of about 0.15 in a long duration. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect