| Autor: |
Taher M. El-Agez, Anas A. Alkanoo, Ahed Afghjani, Sofyan A. Taya |
| Rok vydání: |
2016 |
| Předmět: |
|
| Zdroj: |
Science, Technology and Development. 35:16-21 |
| ISSN: |
0254-6418 |
| DOI: |
10.3923/std.2016.16.21 |
| Popis: |
A homemade spectroscopic ellipsometer is designed indigenously to characterize Si-SiO2 sample and two Poly (9-vinylcarbazole) (PVK) films. In the constructed ellipsometer, the polarizer and analyzer rotate in the same direction with the same angular speed. The ellipsometric parameters ψ and Δ are measured as a function of the wavelength for the three samples. The TF Companion software for thin film analysis is used to analyze the experimental results and obtain the optical parameters and thickness of these samples. The dispersion of the refractive index of SiO2 and PVK thin films is found to obey Cauchy's equation. The results reveal an extremely accurate device for thin film characterization. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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