A Closed-Loop Mode-Localized Accelerometer
| Autor: | Honglong Chang, Jing Yang, Jiming Zhong |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Physics
Mechanical Engineering 010401 analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology Accelerometer 01 natural sciences Noise (electronics) 0104 chemical sciences Computational physics Vibration Resonator Acceleration Normal mode Time domain Sensitivity (control systems) Electrical and Electronic Engineering 0210 nano-technology |
| Zdroj: | Journal of Microelectromechanical Systems. 27:210-217 |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2017.2787544 |
| Popis: | This paper reports a closed-loop mode-localized accelerometer for the first time. The accelerometer utilizes weakly coupled single-tine resonators as the sensing element to decrease the number of vibration modes. Based on a proposed closed-loop readout technique, the transient responses of the mode-localized accelerometer can be measured directly in the time domain. The test results show that the measured amplitude ratio noise and the resolution under closed-loop circumstances are $1.409 \times 10^{-5}/\surd $ Hz and $7.608~\mu \text{g}/\surd $ Hz, respectively, which are largely improved compared with those ( $9.883 \times 10^{-4}/\surd $ Hz and 0.744 mg/ $\surd $ Hz) under the open-loop measurement. The sensitivity based on the amplitude ratio readout is ~124 times higher than that of the frequency with the acceleration input of [−1g, +1g], which indicates that the high sensitivity of the mode-localized sensors can be also obtained utilizing closed-loop control. [2017–0148] |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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