Design of a Bionic Cilia MEMS three-dimensional vibration sensor
| Autor: | Xue Chenyang, Li Zhen, Zhang Guojun, Wu Shujuan |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Coupling
Microelectromechanical systems Materials science Acoustics Condensed Matter Physics Piezoresistive effect Electronic Optical and Magnetic Materials Ion implantation Etching (microfabrication) Materials Chemistry Electronic engineering Workbench Sensitivity (control systems) Electrical and Electronic Engineering Lithography |
| Zdroj: | Journal of Semiconductors. 34:114015 |
| ISSN: | 1674-4926 |
| Popis: | A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbench 12.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7 μV/g and can reach up to 460.2 μV/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0–1000 Hz. |
| Databáze: | OpenAIRE |
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