Charging mechanisms in Y2O3 dielectric films for MEMS capacitive switches
| Autor: | George J. Papaioannou, Matroni Koutsoureli, D. Birmpiliotis, J. Kohylas, A. Ziaei |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Capacitive sensing chemistry.chemical_element 02 engineering and technology Dielectric 01 natural sciences law.invention Stress (mechanics) law Electric field 0103 physical sciences Electrical and Electronic Engineering Safety Risk Reliability and Quality 010302 applied physics Microelectromechanical systems business.industry Yttrium 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Capacitor chemistry Electrode Optoelectronics 0210 nano-technology business |
| Zdroj: | Microelectronics Reliability. :840-845 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/j.microrel.2018.07.087 |
| Popis: | The potential application of Yttrium Oxide (Y2O3) in capacitive Micro-Electro-Mechanical Switches (MEMS) dielectric films is investigated. The electrical properties and the impact of electrical stress on capacitive switches have been investigated with the aid of Metal-Insulator-Metal (MIM) capacitors and MEMS capacitive switches in order to determine the suitability of this material for such application. The assessment in MIMs consisted of recording the current-voltage characteristics in order to determine the transport mechanisms and the charge injection by injecting electrodes during the charging process. The MEMS switches were employed to monitor the charge injection through the bridge during pull-in state and collection during the pull-up state. The process was performed under different stress conditions in order to determine the impact of stressing electric field intensity. |
| Databáze: | OpenAIRE |
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