Piezoelectric AlN energy harvesters for wireless autonomous transducer solutions

Autor:	TM Talal Kamel, R. Elfrink, R. van Schaijk, M. Goedbloed
Rok vydání:	2008
Předmět:	Materials science business.industry Electrical engineering Lead zirconate titanate Piezoelectricity Surface micromachining chemistry.chemical_compound Electricity generation Transducer chemistry Q factor Optoelectronics Wafer business Energy harvesting
Zdroj:	2008 IEEE Sensors.
DOI:	10.1109/icsens.2008.4716379
Popis:	Piezoelectric energy harvesters with aluminum nitride (AlN) are fabricated by micromachining. Devices with different size and mass were fabricated. The devices were packaged by a top and bottom glass wafer with cavities of 200mum to prevent excessive displacements. The devices are characterized on a shaker by applying an oscillation as mechanical input and measuring the power dissipated in a resistive load. A power output was generated of ~10muW for an acceleration of 8g at the resonance frequency of 1155Hz. The power generation for AlN is comparable with lead zirconate-titanate (PZT), despite the much lower piezoelectric constants. This makes AlN a very suitable material for energy harvesters due to its easier processing.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e304af69f61291c31adc5cbbe9a1007f https://doi.org/10.1109/icsens.2008.4716379 Zobrazit plný text záznamu