Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method
| Autor: | Takashi Hamano, Takayuki Matsuda, Yuya Asamoto, Masao Noma, Shigehiko Hasegawa, Michiru Yamashita, Keiichiro Urabe, Koji Eriguchi |
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| Rok vydání: | 2022 |
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| Zdroj: | Applied Physics Letters. 120:031904 |
| ISSN: | 1077-3118 0003-6951 |
| Databáze: | OpenAIRE |
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