Trap Generation in Whole Gate Stacks of FeFET With TiN/Hf0.5Zr0.5O2/SiOx/Si (MFIS) Gate Structure During Endurance Fatigue
Autor: | Jiahui Duan, Shujing Zhao, Fengbin Tian, Jinjuan Xiang, Kai Han, Tingting Li, Hao Xu, Xiaolei Wang, Wenwu Wang, Tianchun Ye |
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Rok vydání: | 2022 |
Předmět: | |
Zdroj: | IEEE Transactions on Electron Devices. 69:6547-6551 |
ISSN: | 1557-9646 0018-9383 |
DOI: | 10.1109/ted.2022.3215935 |
Databáze: | OpenAIRE |
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