Trap Generation in Whole Gate Stacks of FeFET With TiN/Hf0.5Zr0.5O2/SiOx/Si (MFIS) Gate Structure During Endurance Fatigue

Autor: Jiahui Duan, Shujing Zhao, Fengbin Tian, Jinjuan Xiang, Kai Han, Tingting Li, Hao Xu, Xiaolei Wang, Wenwu Wang, Tianchun Ye
Rok vydání: 2022
Předmět:
Zdroj: IEEE Transactions on Electron Devices. 69:6547-6551
ISSN: 1557-9646
0018-9383
DOI: 10.1109/ted.2022.3215935
Databáze: OpenAIRE