Formation of Thin Polymer Films by Electron Bombardment

Autor:	Robert W. Christy
Rok vydání:	1960
Předmět:	chemistry.chemical_compound Materials science Carbon film chemistry Vapor pressure Analytical chemistry General Physics and Astronomy Deposition (phase transition) Electron Substrate (electronics) Current density Electron beam physical vapor deposition Silicone oil
Zdroj:	Journal of Applied Physics. 31:1680-1683
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.1735915
Popis:	Thin insulating films, less than 100 A thick to a few thousand angstroms, were produced by bombarding a substrate with electrons in the presence of silicone oil vapor. The rate of deposition of the solid film was found to depend on the substrate temperature, electron beam current density, and oil vapor pressure. A theoretical expression for the rate is given which agrees satisfactorily with the experimental data. The films which were produced had excellent electrical insulating properties.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e271e4b05745639fa887a936e6ca1791 https://doi.org/10.1063/1.1735915 Zobrazit plný text záznamu