Development model of research sample surface with piezoresistive deflection registration of cantilever beam

Autor: Bohdan Dupak, Roman Ivantsiv, Mykhaylo Lobur
Rok vydání: 2015
Předmět:
Zdroj: The Experience of Designing and Application of CAD Systems in Microelectronics.
DOI: 10.1109/cadsm.2015.7230796
Popis: In this paper the model of research sample surface with registration piezoresistive deflection of beam cantilever mechanical type under ultrasonic acoustic wave.
Databáze: OpenAIRE