Development model of research sample surface with piezoresistive deflection registration of cantilever beam
Autor: | Bohdan Dupak, Roman Ivantsiv, Mykhaylo Lobur |
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Rok vydání: | 2015 |
Předmět: | |
Zdroj: | The Experience of Designing and Application of CAD Systems in Microelectronics. |
DOI: | 10.1109/cadsm.2015.7230796 |
Popis: | In this paper the model of research sample surface with registration piezoresistive deflection of beam cantilever mechanical type under ultrasonic acoustic wave. |
Databáze: | OpenAIRE |
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