An inert marker study for palladium silicide formation: Si moves in polycrystalline Pd2Si

Autor:	U. Shreter, M.-A. Nicolet, K. T. Ho, C.-D. Lien
Rok vydání:	1985
Předmět:	Materials science Silicon Metallurgy General Physics and Astronomy chemistry.chemical_element Crystal growth Tungsten Amorphous solid Crystallinity chemistry.chemical_compound Crystallography chemistry Silicide Crystallite Palladium
Zdroj:	Journal of Applied Physics. 57:227-231
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.334793
Popis:	A novel use of Ti marker is introduced to investigate the moving species during Pd2Si formation on 〈111〉 and 〈100〉 Si substrates. Silicide formed from amorphous Si is also studied using a W marker. Although these markers are observed to alter the silicide formation in the initial stage, the moving species can be identified once a normal growth rate is resumed. It is found that Si is the dominant moving species for all three types of Si crystallinity. However, Pd will participate in mass transport when Si motion becomes obstructed. off
Databáze:	OpenAIRE
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