Radio frequency magnetron sputter deposited ZnO films doped with Al, Ga and Ti
| Autor: | Sew Kin Wong, Wai-Leong Pang, Zi Neng Ng, Chu-Liang Lee, Mian-En Yeoh, Kah-Yoong Chan, Cheng-Yang Low, Benedict Wen Cheun Au |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Analytical chemistry Oxide chemistry.chemical_element 02 engineering and technology Zinc 01 natural sciences law.invention chemistry.chemical_compound law Sputtering 0103 physical sciences General Materials Science Electronics 010302 applied physics business.industry Mechanical Engineering Doping Transistor 021001 nanoscience & nanotechnology Condensed Matter Physics chemistry Mechanics of Materials Optoelectronics Radio frequency magnetron 0210 nano-technology business |
| Zdroj: | Materials Research Innovations. :1-6 |
| ISSN: | 1433-075X 1432-8917 |
| DOI: | 10.1080/14328917.2017.1356013 |
| Popis: | Zinc oxide (ZnO) is a key material in the field of transparent large-area electronics. Some of the ZnO applications in large-area electronics include sensors, transistors and solar cells. I... |
| Databáze: | OpenAIRE |
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