Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

Autor:	T N Terentev, V S Zheltukhin, A Yu Shemakhin, I K Nekrasov, E S Samsonova, E Yu Shemakhin, I E Tsokalo, V A Tyurin
Rok vydání:	2022
Předmět:	History Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2270:012014
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/2270/1/012014
Popis:	An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e242887e21771fa458b8fcc6ead9169d https://doi.org/10.1088/1742-6596/2270/1/012014 Zobrazit plný text záznamu