Determination of oxygen and nitrogen in tantalum thin films by nuclear techniques and Auger spectroscopy

Autor:	S. U. Campisano, P. Baeri, G. Della Mea, M. Cocito
Rok vydání:	1978
Předmět:	Auger electron spectroscopy Materials science Metals and Alloys Tantalum Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Oxygen Nitrogen Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Materials Chemistry Thin film
Zdroj:	Thin Solid Films. 51:L5-L8
ISSN:	0040-6090
DOI:	10.1016/0040-6090(78)90206-7
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e2371306f0737d3db42cbcc27b7a9074 https://doi.org/10.1016/0040-6090(78)90206-7 Zobrazit plný text záznamu