Photolithographically definable SU‐8–alumina composite for W‐band dielectric resonator antennas
| Autor: | Nacer Debbar, Mohamed Abdel-Rahman, Najeeb Al-Khalli, M. Alduraibi, Majeed A. S. Alkanhal, Muhammad Kamran Saleem, Abdel-Razik Sebak |
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| Rok vydání: | 2016 |
| Předmět: |
Dielectric resonator antenna
Materials science business.industry 020208 electrical & electronic engineering Composite number Biomedical Engineering Relative permittivity 020206 networking & telecommunications Bioengineering 02 engineering and technology Dielectric Dielectric resonator Photoresist Condensed Matter Physics law.invention law visual_art 0202 electrical engineering electronic engineering information engineering visual_art.visual_art_medium Optoelectronics General Materials Science Ceramic Photolithography business |
| Zdroj: | Micro & Nano Letters. 11:224-229 |
| ISSN: | 1750-0443 |
| DOI: | 10.1049/mnl.2015.0389 |
| Popis: | A novel process has been developed for fabricating ceramic dielectric structures with dimensions applicable to W-band millimetre wave dielectric resonator antennas. The ceramic dielectric structures are based on composites of SU-8 2150 photoresist and alumina (Al2O3)-alpha nanopowder. The effects of increasing the weight percentage of Al2O3 nanopowder on the photo-polymerisation of the SU-8–Al2O3 composite were systematically investigated. Cylindrical structures with thicknesses up to 500 µm have been fabricated using single casted conventional ultraviolet lithography. The relative permittivity of SU-8–Al2O3 composites at different weight percentages of Al2O3 was studied showing an increase from a relative permittivity of 4.5 to 5.66 with increasing the Al2O3 weight percentage from 0 to 35%. Also, finally, double layer manufacturing of ceramic SU-8–Al2O3 composite structures was demonstrated. |
| Databáze: | OpenAIRE |
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